By Yannick Le Tiec
Microelectronics is a posh international the place many sciences have to collaborate to create nano-objects: we'd like services in electronics, microelectronics, physics, optics and mechanics additionally crossing into chemistry, electrochemistry, in addition to biology, biochemistry and medication. Chemistry is focused on many fields from fabrics, chemical substances, gases, beverages or salts, the fundamentals of reactions and equilibrium, to the optimized cleansing of surfaces and selective etching of particular layers. additionally, over fresh many years, the scale of the transistors has been tremendously lowered whereas the performance of circuits has elevated. This e-book contains 5 chapters masking the chemical substances and sequences utilized in processing, from cleansing to etching, the function and impression in their purity, in addition to the fabrics utilized in “Front finish Of the road” which corresponds to the center and function of person transistors, then relocating directly to the “Back finish Of the road” that's relating to the interconnection of the entire transistors. ultimately, the necessity for particular functionalization additionally calls for key wisdom on floor remedies and chemical administration to permit new applications.
1. Chemistry within the “Front finish of the road” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis.
three. The Chemistry of rainy floor coaching: cleansing, Etching and Drying, Yannick Le Tiec and Martin Knotter.
four. The Use and administration of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti.
five. floor Functionalization for Micro- and Nanosystems: software to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet.
About the Authors
Yannick Le Tiec is a technical specialist at CEA-Leti, Minatec considering 2002. he's a CEA-Leti assignee at IBM, Albany (NY) to boost the complex 14 nm CMOS node and the FDSOI expertise. He held varied technical positions from the complicated three hundred mm SOI CMOS pilot line to varied assignments inside of SOITEC for complicated wafer improvement and later inside of INES to optimize sunlight cellphone ramp-up and yield. He has been a part of the ITRS entrance finish technical operating workforce at ITRS because 2008.